AN-92-09-2 -- Experimental and Numerical Results for Air Flow and Particle Transport in a Microelectronics Clean Room PDF

Presents experimental measurements of time-averaged air velocities, turbulence intensity, and turbulent frequency distribution near an exhaust bench located in a Class 10 side-wall exhaust, tunnel-type clean room. Particle concentration data were also obtained from four particle-source locations using PSL particles of 0.357 and 1.09 micron diameter. A variety of two-dimensional numerical solutions have been obtained for this configuration. Quantitative comparisons are given for time-averaged air flow velocity magnitude and direction and particle concentration. The good agreement between the measured and computed velocity results shows that numerical models can accurately predict the flow pattern in this configuration. However, the particle concentration agreement is not as good.

KEYWORDS: measuring, experiment, calculating, air flow, particles, clean rooms, electronics industry, air flow rate, turbulent flow, air pollution, indoor, comparing, accuracy