SL-90-05-4 -- HVAC Systems for Semiconductor Clean Rooms---Part 2: Total System Dynamics PDF

SL-90-05-4 -- HVAC Systems for Semiconductor Clean Rooms---Part 2: Total System Dynamics PDF

Name:
SL-90-05-4 -- HVAC Systems for Semiconductor Clean Rooms---Part 2: Total System Dynamics PDF

Published Date:
1990

Status:
Active

Description:

Publisher:
ASHRAE

Document status:
Active

Format:
Electronic (PDF)

Delivery time:
10 minutes

Delivery time (for Russian version):
200 business days

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Choose Document Language:
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Demonstrates the unique system dynamics of seven different semiconductor clean room designs. Analyses each system for the interaction of air and water- side dynamics of the HVAC design. Includes a summary of operating costs and recommendations for efficient system operating procedures.

KEYWORDS: Clean rooms, heating ventilation, air conditioning, costs, cost in use, efficiency.


File Size : 1 file , 1.1 MB
Note : This product is unavailable in Russia, Belarus
Number of Pages : 8
Product Code(s) : D-18702
Published : 1990

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