In order to develop a high stiffness ultraprecision centerless grinding machine for grinding of ceramic ferrules and rollers for optical fiber communication and ultraprecision bearing applications, an ultra-stiff nanoprecision linear piezomotor was recently developed. This linear piezomotor was designed to have a positioning resolution of 5 nm, and a feed system stiffness of about 2190 N/?m. Three high-voltage piezoelectric actuators were integrated by a monolithic flexure frame. This monolithic frame was designed to have multi-functions such as protecting and preloading three piezoelectric actuators and withstanding all the shearing forces during operation. The monolithic frame as a motion mechanism eliminates backlash problem. The stiffness distributions in certain directions over the frame were designed using FEM. The microdynamic behavior of the piezomotor was studied to predict its
| Number of Pages : | 12 |
| Published : | 11/01/1999 |
