SHORT WAVELENGTH RADIATION AT HIGH AVERAGE POWER LEVELS GIVES EXCIMERS AN OPERATING ADVANTAGE OVER INFRARED LASERS, AND THIS CHARACTERISTIC MAKES THEM AN EXCELLENT NONCONTACT TOOL FOR PROCESSING METALS, PLASTICS, AND CERAMICS WHICH CANNOT TOLERATE THERMAL STRESS. THE HIGH PHOTON ENERGY AND THE VERY SHORT DURATION OF THE EXCIMER PULSES CAN EFFICIENTLY INITIATE PHOTOCHEMICAL AND/OR PHOTOTHERMAL SURFACE REACTIONS LEADING TO PRECISION MICROMACHINING, INDELIBLE MARKING, AND MICROSTRUCTURE MODIFICATION.
| Number of Pages : | 13 |
| Published : | 06/01/1990 |
