THIS PAPER FOCUSES ON DISTRIBUTED REAL-TIME CONTROL OF SEMICONDUCTOR PROCESS EQUIPMENT. OBJECT-ORIENTED DESIGN CONCEPTS ARE PRESENTED FOR CLUSTER CONTROL OF ADVANCED WET AND DRY CHEMICAL CLEANING OF SILICON WAFERS. THE REQUIREMENTS FOR MODULARITY, MAINTAINABILITY, AND EXTENSIBILITY ARE ADDRESSED USING OBJECT-ORIENTED DESIGN TECHNIQUES. OBJECT-ORIENTED DESIGN IS COMPARED AND CONTRASTED WITH FUNCTION-ORIENTED DESIGN. AN EXAMPLE OF OBJECT-ORIENTED ANALYSIS IS PRESENTED FOR A MULTISTATION SINGLE WAFER CLEANING SYSTEM.
| Number of Pages : | 14 |
| Published : | 06/01/1990 |
