THIS PAPER PRESENTS A NOVEL LANGUAGE WHICH PROVIDES A HIGH LEVEL PROGRAMMING ENVIRONMENT FOR COMMUNICATION TO SEMICONDUCTOR EQUIPMENT VIA THE SECS PROTOCOL. IT ALLOWS FOR COMMUNICATION TO MULTIPLE SECS EQUIPMENT TO BE PROGRAMMED FROM A SINGLE PC. PROVISION IS MADE FOR PARALLEL PROCESSING, SYNCHRONIZATION AMONG EXECUTION PATHS, AND OTHER REAL-TIME CONTROL CONSTRUCTS.
IEEE Recommended Practice - General Principles for Temperature Limits in the Rating of Electrical Equipment and for the Evaluation of Electrical Insulation
