NONCONTACT HANDLING OF SEMICONDUCTOR WAFERS IS PROPOSED TO ALLEVIATE THE CONTAMINATION PROBLEMS OF SINGLE WAFER PROCESSING. MAGNETIC LEVITATION, THE MEISSNER EFFECT, OR GAS BERRINGS WILL LEVITATE A WAFER ABOVE A PLATFORM. BY MOVING THE PLATFORM AND CONTROLLING ITS TILT, THE WAFER CAN BE TRANSPORTED FROM POSITION TO POSITION WITHOUT ANY CONTACT WITH MATERIAL SURFACES. SOFTWARE TO ROBOTICALLY CONTROL THE PATH AND TILT OF THE PLATFORM AND METHODS OF TRANSFERRRING THE WAFER FROM ONE PLATFORM TO ANOTHER WILL BE INCLUDED TO COMPLETE THE NONCONTACT WAFER HANDLING PACKAGE.
| Number of Pages : | 10 |
| Published : | 06/01/1990 |
