Micro-Electromechanical System Technology -- General Rules For The Assessment Of Micro-Geometrical Parameters

Publisher:
Standards Press of China

Document status:

Active

Format:

Electronic (PDF)

Delivery time:

10 minutes

Delivery time (for Russian version):

200 business days

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Please note: This publication has been translated into English and may contain some spelling, grammatical, and other minor editorial errors.

SPC GB/T 26113-2010 specifies the general rules for assessment of the micro-geometrical parameters of MEMS products. The general rules include the basic assessment principles, the assessment features, the assessment procedure, the assessment methods, and the assessment rules.

File Size :	1 file , 460 KB
Number of Pages :	16
Published :	01/10/2011

SPC GB/T 26113-2010 PDF

Micro-Electromechanical System Technology -- General Rules For The Assessment Of Micro-Geometrical Parameters

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