Name:
Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography PDF
Published Date:
01/01/1997
Status:
[ Active ]
The dynamic field of lithography demands an authoritative handbook for process development and production, and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook.
Author: Prosenjit Rai-Choudhury
| Edition : | 97 |
| Number of Pages : | 778 |
| Published : | 01/01/1997 |
| isbn : | * isbn 978151 |
