Name:
Handbook of Microlithography, Micromachining, and Microfabrication, Volume 2: Micromachining and Microfabrication PDF
Published Date:
01/01/1997
Status:
[ Active ]
This handbook contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook. Eleven chapters cover key aspects of micromachining and microfabrication, including numerous device applications.
Author: Prosenjit Rai-Choudhury
| Edition : | 97 |
| Number of Pages : | 702 |
| Published : | 01/01/1997 |
| isbn : | * isbn 978151 |
