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Handbook of Microlithography, Micromachining, and Microfabrication, Volume 2: Micromachining and Microfabrication PDF

Handbook of Microlithography, Micromachining, and Microfabrication, Volume 2: Micromachining and Microfabrication PDF

Name:
Handbook of Microlithography, Micromachining, and Microfabrication, Volume 2: Micromachining and Microfabrication PDF

Published Date:
01/01/1997

Status:
[ Active ]

Description:

Publisher:
International Society for Optics and Photonics

Document status:
Active
Format:
Electronic (PDF)
Delivery time:
10 minutes
Delivery time (for Russian version):
200 business days
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Choose Document Language:
$41.4
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PM40 * ISBN: 9781510607972

This handbook contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook. Eleven chapters cover key aspects of micromachining and microfabrication, including numerous device applications.

Author: Prosenjit Rai-Choudhury


Edition : 97
Number of Pages : 702
Published : 01/01/1997
isbn : * isbn 978151

History

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