Name:
MEMS and MOEMS Technology and Applications PDF
Published Date:
01/01/2000
Status:
[ Active ]
Cost, size, speed, weight, and precision are driving the miniaturization of mechanical systems. This book presents a detailed look at two micromachining technologies that have evolved from the integrated circuits industry: MEMS (micro-electromechanical systems) and MOEMS (micro systems with a strong optical component). It is useful as a professional reference, technology user's guide, and as a textbook.
Author: Prosenjit Rai-Choudhury
| Edition : | 00 |
| Number of Pages : | 534 |
| Published : | 01/01/2000 |
| isbn : | * isbn 978151 |
