Name:
Ultra Clean Processing of Semiconductor Surfaces XIV PDF
Published Date:
08/07/2018
Status:
[ Active ]
Publisher:
Trans Tech Publications Inc.
The 14th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (14th UCPSS 2018, Leuven, Belgium, September 3-5, 2018) was organized by IMEC and the scope of this symposium includes all issues related to contamination, cleaning and surface preparation in mainstream large-scale Integrated Circuit manufacturing. This collection will be interesting and useful for experts in the field of microelectronics.
Authors: Mertens, Paul
| Edition : | 18 |
| File Size : | 1 file , 77 MB |
| Number of Pages : | 339 |
| Published : | 08/07/2018 |
| isbn : | 9783035734171 |
