ASTM E766-98(2003) PDF

1.1 This practice covers general procedures necessary for the calibration of magnification of scanning electron microscopes. The relationship between true magnification and indicated magnification is a complicated function of operating conditions. Therefore, this practice must be applied to each set of standard operating conditions to be used.

1.2 The values stated in SI units are to be regarded as the standard.

1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.