ASTM E766-98 PDF

1.1 This practice is designed to calibrate the magnification of scanning electron microscopes (SEMs) using the National Institute of Standards and Technology (NIST) calibration specimen Standard Reference Material (SRM)484. Since the relationship between true magnification and magnification indicated on the SEM readout may be different at different magnifications, this practice must be applied to each magnification for which true magnification is desired.

1.2 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.