Document status: Active
Cleanrooms and associated controlled environments - Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration
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Cleanrooms and associated controlled environments - Part 16: Code of practice for improving energy efficiency in cleanrooms and clean air devices
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Cleanrooms and Associated Controlled Environments - Part 18: Assessment of Suitability of Consumables
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Cleanrooms and associated controlled environments - Part 4: Design, construction and start-up
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Cleanrooms and associated controlled environments - Part 8: Assessment of air cleanliness by chemical concentration (ACC)
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Cleanrooms and associated controlled environments — Part 9: Assessment of surface cleanliness for particle concentration
Document status: Active
Document status: Active
