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Semiconductor devices. Micro-electromechanical devices-Test method for the nonlinear vibration of MEMS resonators
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Semiconductor devices. Micro-electromechanical devices-Test method for adhesion strength of metal powder paste in MEMS interconnection
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Semiconductor devices. Micro-electromechanical devices-RF MEMS circulators and isolators
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Semiconductor devices. Micro-electromechanical devices-Measurement methods of electro-mechanical conversion characteristics of piezoelectric MEMS cantilever
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Semiconductor devices. Micro-electromechanical devices-Test method of electrical characteristics after cyclic bending deformation for flexible micro-electromechanical devices
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Semiconductor devices. Micro-electromechanical devices-Test methods for dynamic performances of MEMS resonant electric-field-sensitive devices
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Semiconductor devices. Micro-electromechanical devices-Test method for determining solution concentration by optical absorption using MEMS fluidic device
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Electricity metering. Payment systems-Standard transfer specification (STS). Application layer protocol for one-way token carrier systems
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