DANSK DS/EN 62047-21 PDF

Name:
DANSK DS/EN 62047-21 PDF

Published Date:
10/17/2014

Status:
[ Active ]

Description:

Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials

Publisher:
Dansk Standard

Document status:

Active

Format:

Electronic (PDF)

Delivery time:

10 minutes

Delivery time (for Russian version):

200 business days

SKU:

SAME AS IEC 62047-21

IEC 62047-21:2014 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 Âµm.

Edition :	14
File Size :	1 file , 1.9 MB
Number of Pages :	19
Product Code(s) :	DS-017, DS-017
Published :	10/17/2014

History

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