DIN EN 62047-12 PDF

Name:
DIN EN 62047-12 PDF

Published Date:
06/01/2012

Status:
Active

Description:

Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures (IEC 62047-12:2011); German version EN 62047-12:2011

Publisher:
DIN-adopted European Standard

Document status:

Active

Format:

Electronic (PDF)

Delivery time:

10 minutes

Delivery time (for Russian version):

200 business days

SKU:

File Size :	1 file
Note :	This product is unavailable in Russia, Ukraine, Belarus
Number of Pages :	31
Product Code(s) :	1881344, 1881344
Published :	06/01/2012

History

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DIN EN 62047-12 PDF

Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures (IEC 62047-12:2011); German version EN 62047-12:2011

History

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