Name:
Fabrication of GaAs Devices PDF
Published Date:
01/01/2005
Status:
[ Active ]
Publisher:
Institution of Engineering and Technology
The following topics are dealt with: semiconductor properties, semiconductor growth, cleaning; passivation; dry etching; ohmic contacts; Schottky contacts; field effect transistors; heterojunction bipolar transistors; wet oxidation; optoelectronic device; and MIS GaAs device.
Authors
A. Baca and C. Ashby
| Edition : | 05 |
| File Size : | 1 file , 2 MB |
| Number of Pages : | 370 |
| Published : | 01/01/2005 |
