Name:
ISO 18114:2021 PDF
Published Date:
05/01/2021
Status:
Active
This document specifies a method of determining relative sensitivity factors (RSFs) for secondary-ion mass spectrometry (SIMS) from ion-implanted reference materials.
The method is applicable to specimens in which the matrix is of uniform chemical composition, and in which the peak concentration of the implanted species does not exceed one atomic percent.
| File Size : | 1 file , 1000 KB |
| Note : | This product is unavailable in Ukraine, Russia, Belarus |
| Published : | 05/01/2021 |
