Name:
ISO 18114:2003 PDF
Published Date:
04/01/2003
Status:
Active
ISO 18114:2003 specifies a method of determining relative sensitivity factors (RSFs) for secondary-ion mass spectrometry (SIMS) from ion-implanted reference materials.
The method is applicable to specimens in which the matrix is of uniform chemical composition, and in which the peak concentration of the implanted species does not exceed one atomic percent.
| File Size : | 1 file , 150 KB |
| Note : | This product is unavailable in Ukraine, Russia, Belarus |
| Number of Pages : | 4 |
| Published : | 04/01/2003 |
| Same As : | ISO 18114:2003 |
