Name:
ISO 20341:2003 PDF
Published Date:
07/15/2003
Status:
Active
ISO 20341:2003 specifies procedures for estimating three depth resolution parameters, viz the leading-edge decay length, the trailing-edge decay length and the Gaussian broadening, in SIMS depth profiling using multiple delta-layer reference materials.
It is not applicable to delta-layers where the chemical and physical state of the near-surface region, modified by the incident primary ions, is not in the steady state.
| File Size : | 1 file , 220 KB |
| Note : | This product is unavailable in Ukraine, Russia, Belarus |
| Number of Pages : | 5 |
| Published : | 07/15/2003 |
| Same As : | ISO 20341:2003 |
