A KrF excimer laser was employed to investigate the material removal characteristics of Nylon 66. Laser machining was conducted in air and in a variety of liquid media. Experimental data showed that the material removal rate was increased from 2 microns per pulse in air to 2.5 microns per pulse when methanol or ethyl alcohol was used as the medium. In addition, the feature size shrunk and thermal damaged zone became insignificant. A model based on photochemical and thermal effects closely predicted the experimental data and showed that organic solvents increased the effective absorption coefficient by about 350%.
| Number of Pages : | 6 |
| Published : | 11/01/1998 |
