ASTM F1238-95(1999) PDF

Name:
ASTM F1238-95(1999) PDF

Published Date:
12/10/1999

Status:
Active

Description:

Standard Specification for Refractory Silicide Sputtering Targets for Microelectronic Applications

Publisher:
ASTM International

Document status:

Active

Format:

Electronic (PDF)

Delivery time:

10 minutes

Delivery time (for Russian version):

200 business days

SKU:

1.1 This specification covers sputtering targets fabricated from metallic silicides (molybdenum silicide, tantalum silicide, titanium silicide, and tungsten silicide). These targets are referred to as refractory silicide targets, and are intended for use in microelectronic applications.

1.2 The values stated in SI units are regarded as standard.

File Size :	1 file , 27 KB
Note :	This product is unavailable in Russia, Ukraine, Belarus
Number of Pages :	2
Published :	12/10/1999

History

ASTM F1238-95(2011)

Published Date: 06/01/2011

Standard Specification for Refractory Silicide Sputtering Targets for Microelectronic Applications (Withdrawn 2020)

$15.6

ASTM F1238-95(2003)

Published Date: 01/01/2003

Standard Specification for Refractory Silicide Sputtering Targets for Microelectronic Applications

$15

ASTM F1238-95(1999)

Published Date: 12/10/1999

Standard Specification for Refractory Silicide Sputtering Targets for Microelectronic Applications

$15

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