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ASTM F1238-95(2003) PDF

ASTM F1238-95(2003) PDF

Name:
ASTM F1238-95(2003) PDF

Published Date:
01/01/2003

Status:
Active

Description:

Standard Specification for Refractory Silicide Sputtering Targets for Microelectronic Applications

Publisher:
ASTM International

Document status:
Active
Format:
Electronic (PDF)
Delivery time:
10 minutes
Delivery time (for Russian version):
200 business days
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Choose Document Language:
$15
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1.1 This specification covers sputtering targets fabricated from metallic silicides (molybdenum silicide, tantalum silicide, titanium silicide, and tungsten silicide). These targets are referred to as refractory silicide targets, and are intended for use in microelectronic applications.

1.2 The values stated in SI units are regarded as standard.


File Size : 1 file , 25 KB
Note : This product is unavailable in Russia, Ukraine, Belarus
Number of Pages : 2
Published : 01/01/2003

History

ASTM F1238-95(2011)
ASTM F1238-95(2011)
Published Date: 06/01/2011
Standard Specification for Refractory Silicide Sputtering Targets for Microelectronic Applications (Withdrawn 2020)
$15.6
ASTM F1238-95(2003)
ASTM F1238-95(2003)
Published Date: 01/01/2003
Standard Specification for Refractory Silicide Sputtering Targets for Microelectronic Applications
$15
ASTM F1238-95(1999)
ASTM F1238-95(1999)
Published Date: 12/10/1999
Standard Specification for Refractory Silicide Sputtering Targets for Microelectronic Applications
$15

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