ASTM F1238-95(2003) PDF

ASTM F1238-95(2003) PDF

Name:
ASTM F1238-95(2003) PDF

Published Date:
01/01/2003

Status:
Active

Description:

Standard Specification for Refractory Silicide Sputtering Targets for Microelectronic Applications

Publisher:
ASTM International

Document status:

Active

Format:

Electronic (PDF)

Delivery time:

10 minutes

Delivery time (for Russian version):

200 business days

SKU:

1.1 This specification covers sputtering targets fabricated from metallic silicides (molybdenum silicide, tantalum silicide, titanium silicide, and tungsten silicide). These targets are referred to as refractory silicide targets, and are intended for use in microelectronic applications.

1.2 The values stated in SI units are regarded as standard.

File Size :	1 file , 25 KB
Note :	This product is unavailable in Russia, Ukraine, Belarus
Number of Pages :	2
Published :	01/01/2003

History

ASTM F1238-95(2011)

ASTM F1238-95(2011)

Published Date: 06/01/2011

Standard Specification for Refractory Silicide Sputtering Targets for Microelectronic Applications (Withdrawn 2020)

$15.6

ASTM F1238-95(2003)

ASTM F1238-95(2003)

Published Date: 01/01/2003

Standard Specification for Refractory Silicide Sputtering Targets for Microelectronic Applications

$15

ASTM F1238-95(1999)

ASTM F1238-95(1999)

Published Date: 12/10/1999

Standard Specification for Refractory Silicide Sputtering Targets for Microelectronic Applications

$15

Related products

ASTM F816-83(2003)

ASTM F816-83(2003)

Published Date: 01/01/2003

Standard Test Method for Combined Fine and Gross Leaks for Large Hybrid Microcircuit Packages (Withdrawn 2009)

$15

Published Date: 01/10/2002

Standard Test Method for Dimensions of Notches on Silicon Wafers (Withdrawn 2003)

$13.8

ASTM F78-97(2002)

ASTM F78-97(2002)

Published Date: 12/10/2002

Standard Test Method for Calibration of Helium Leak Detectors by Use of Secondary Standards (Withdrawn 2008)

$17.4

ASTM F459-13(2018)

ASTM F459-13(2018)

Published Date: 03/01/2018

Standard Test Methods for Measuring Pull Strength of Microelectronic Wire Bonds (Withdrawn 2023)

$22.5

Best-Selling Products

Published Date: 11/01/1992

Engineering Design Standards - Key Control Characteristics (KCC)

INTERN CEMS A-0 PART I SEC A AND B

INTERN CEMS A-0 PART I SEC A AND B

Published Date: 10/01/2001

Chemical Composition of International Standard Steels

INTERN CEMS A-0 PART I SEC A

INTERN CEMS A-0 PART I SEC A

Published Date: 10/01/2012

Chemical Composition of Standard Steels – Part I, Section A – North American Steels

INTERN CEMS A-0 PART I SEC A

INTERN CEMS A-0 PART I SEC A

Published Date: 01/01/1971

Chemical Composition of IH Standard Steels

INTERN CEMS A-0 PART I SEC A

INTERN CEMS A-0 PART I SEC A

Published Date: 02/01/2014

VOID - Chemical Composition of Standard Steels – Part I, Section A – North American Steels

$9

INTERN CEMS A-0 PART I SEC A

INTERN CEMS A-0 PART I SEC A

Published Date: 07/01/1999

Chemical Composition of International Standard Steels