ASTM F1238-95(2003) PDF

Name:
ASTM F1238-95(2003) PDF

Published Date:
01/01/2003

Status:
Active

Description:

Standard Specification for Refractory Silicide Sputtering Targets for Microelectronic Applications

Publisher:
ASTM International

Document status:

Active

Format:

Electronic (PDF)

Delivery time:

10 minutes

Delivery time (for Russian version):

200 business days

SKU:

1.1 This specification covers sputtering targets fabricated from metallic silicides (molybdenum silicide, tantalum silicide, titanium silicide, and tungsten silicide). These targets are referred to as refractory silicide targets, and are intended for use in microelectronic applications.

1.2 The values stated in SI units are regarded as standard.

File Size :	1 file , 25 KB
Note :	This product is unavailable in Russia, Ukraine, Belarus
Number of Pages :	2
Published :	01/01/2003

History

ASTM F1238-95(2011)

Published Date: 06/01/2011

Standard Specification for Refractory Silicide Sputtering Targets for Microelectronic Applications (Withdrawn 2020)

$15.6

ASTM F1238-95(2003)

Published Date: 01/01/2003

Standard Specification for Refractory Silicide Sputtering Targets for Microelectronic Applications

$15

ASTM F1238-95(1999)

Published Date: 12/10/1999

Standard Specification for Refractory Silicide Sputtering Targets for Microelectronic Applications

$15

Related products

ASTM F816-83(2003)

Published Date: 01/01/2003

Standard Test Method for Combined Fine and Gross Leaks for Large Hybrid Microcircuit Packages (Withdrawn 2009)

$15

ASTM F1152-02

Published Date: 01/10/2002

Standard Test Method for Dimensions of Notches on Silicon Wafers (Withdrawn 2003)

$13.8

ASTM F78-97(2002)

Published Date: 12/10/2002

Standard Test Method for Calibration of Helium Leak Detectors by Use of Secondary Standards (Withdrawn 2008)

$17.4

ASTM F459-13(2018)

Published Date: 03/01/2018

Standard Test Methods for Measuring Pull Strength of Microelectronic Wire Bonds (Withdrawn 2023)

$22.5

Best-Selling Products

DIN ISO/IEC 10030

Published Date: 07/01/1996

Open Systems Interconnection - Address information exchange protocol for use in conjunction with DIN ISO/IEC 8878 on a subnetwork; identical with ISO/IEC 10030:1995

$40.875

DIN ISO/IEC 10561

Published Date: 08/01/1998

Information technology - Office equipment - Method for measuring throughput class 1 and class 2 printers (ISO/IEC 10561:1997)

$17.985

DIN ISO/IEC 13273-1 - DRAFT

Published Date: 07/01/2013

Draft Document - Energy efficiency and renewable energy sources - Common international terminology - Part 1: Energy Efficiency (ISO/IEC/DIS 13273-1:2013)

$29.103

DIN ISO/IEC 13273-2 - DRAFT

Published Date: 07/01/2013

Draft Document - Energy efficiency and renewable energy sources - Common international terminology - Part 2: Renewable Energy Sources (ISO/IEC/DIS 13273-2:2013)

$24.525

DIN ISO/IEC 13335-1

Published Date: 11/01/2006

Information technology - Security techniques - Management of information and communications technology security - Part 1: Concepts and models for information and communications technology security management (ISO/IEC 13335-1:2004, text in English)

$31.392

DIN ISO/IEC 14473

Published Date: 05/01/2000

Information technology - Office equipment - Minimum information to be specified for image scanners (ISO/IEC 14473:1998)

$15.696