Low prices! Originals & Translations! Save your budget and time!
ONLINENORMS: Online Standards Store
Click View Shopping Cart
  1. Home
  2. ASTM
  3. ASTM F2113-01 PDF

ASTM F2113-01 PDF

ASTM F2113-01 PDF

Name:
ASTM F2113-01 PDF

Published Date:
06/10/2001

Status:
Active

Description:

Standard Guide for Analysis and Reporting the Impurity Content and Grade of High Purity Metallic Sputtering Targets for Electronic Thin Film Applications

Publisher:
ASTM International

Document status:
Active
Format:
Electronic (PDF)
Delivery time:
10 minutes
Delivery time (for Russian version):
200 business days
SKU:
Choose Document Language:
$15
Need Help?

1.1 This guide covers sputtering targets used as thin film source material in fabricating semiconductor electronic devices. It should be used to develop target specifications for specific materials and should be referenced therein.

1.2 This standard sets purity grade levels, analytical methods and impurity content reporting method and format.

1.2.1 The grade designation is a measure of total metallic impurity content. The grade designation does not necessarily indicate suitability for a particular application because factors other than total metallic impurity may influence performance.


File Size : 1 file , 16 KB
Note : This product is unavailable in Russia, Ukraine, Belarus
Number of Pages : 2
Published : 06/10/2001

History

ASTM F2113-01(2011)
ASTM F2113-01(2011)
Published Date: 06/01/2011
Standard Guide for Analysis and Reporting the Impurity Content and Grade of High Purity Metallic Sputtering Targets for Electronic Thin Film Applications (Withdrawn 2020)
$15.6
ASTM F2113-01(2007)
ASTM F2113-01(2007)
Published Date: 06/01/2007
Standard Guide for Analysis and Reporting the Impurity Content and Grade of High Purity Metallic Sputtering Targets for Electronic Thin Film Applications
$15
ASTM F2113-01e1
ASTM F2113-01e1
Published Date: 06/10/2001
Standard Guide for Analysis and Reporting the Impurity Content and Grade of High Purity Metallic Sputtering Targets for Electronic Thin Film Applications
$15
ASTM F2113-01
ASTM F2113-01
Published Date: 06/10/2001
Standard Guide for Analysis and Reporting the Impurity Content and Grade of High Purity Metallic Sputtering Targets for Electronic Thin Film Applications
$15

Related products

ASTM F43-99
ASTM F43-99
Published Date: 12/10/1999
Standard Test Methods for Resistivity of Semiconductor Materials (Withdrawn 2003)
$17.4
ASTM F534-02a
ASTM F534-02a
Published Date: 12/10/2002
Standard Test Method for Bow of Silicon Wafers (Withdrawn 2003)
$13.8
ASTM F533-02a
ASTM F533-02a
Published Date: 12/10/2002
Standard Test Method for Thickness and Thickness Variation of Silicon Wafers (Withdrawn 2003)
$15.6
ASTM F30-96(2017)
ASTM F30-96(2017)
Published Date: 06/01/2017
Standard Specification for Iron-Nickel Sealing Alloys (Withdrawn 2024)
$22.5

Best-Selling Products

ITU-R 27
ITU-R 27
Published Date: 01/01/1993
HF Field-Strength Measurement Campaign
$8.4
ITU-R 346-1
ITU-R 346-1
Published Date: 01/01/1970
(WITHDRAWN) Four-Frequency Diplex Systems - Section 3Ca - Radiotelegraph Circuits
$0.3
ITU-R 41-1 FRENCH
ITU-R 41-1 FRENCH
Published Date: 01/01/2000
Collaboration avec l'Organisation internationale de normalisation (ISO) et la Commission électrotechnique internationale (CEI) sur les techniques de la radiodiffusion
ITU-R 41-1 SPANISH
ITU-R 41-1 SPANISH
Published Date: 01/01/2000
Colaboración con la Organización Internacional de Normalización (ISO) y la Comisión Electrotécnica Internacional (CEI) sobre tecnologías de radiodifusión
ITU-R 903-2 SPANISH
ITU-R 903-2 SPANISH
Published Date: 01/01/1990
TRANSMISIÓN DIGITAL EN EL SERVICIO MÓVIL TERRESTRE
ITU-R 917-2 SPANISH
ITU-R 917-2 SPANISH
Published Date: 01/01/1990
NIVELES ADMISIBLES DE INTERFERENCIA EN LOS CANALES TELEFÓNICOS DEL SERVICIO MÓVIL MARÍTIMO POR SATÉLITE