Evaluation of thickness, density and interface width of thin films by X-ray reflectometry. Instrumental requirements, alignment and positioning, data collection, data analysis and reporting

Publisher:
British Standard / International Organization for Standardization

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Active

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Electronic (PDF)

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10 minutes

Delivery time (for Russian version):

200 business days

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This document specifies a method for the evaluation of thickness, density and interface width of single layer and multi-layered thin films which have thicknesses between approximately 1 nm and 1 µm, on flat substrates, by means of X-Ray Reflectometry (XRR).

All current amendments available at time of purchase are included with the purchase of this document.

File Size :	1 file , 3.7 MB
ISBN(s) :	9780539016529
Note :	This product is unavailable in Russia, Ukraine, Belarus
Number of Pages :	42
Product Code(s) :	30380296, 30380296, 30380296
Published :	08/18/2020

BS ISO 16413:2020 PDF

Evaluation of thickness, density and interface width of thin films by X-ray reflectometry. Instrumental requirements, alignment and positioning, data collection, data analysis and reporting

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