JEDEC JEP001-3B PDF

This document describes test and data methods on technology qualification vehicles for the qualification of semiconductor technologies. It does not give pass or fail values or recommend specific test equipment, test structures or test algorithms. Wherever possible, it references applicable JEDEC, such as JESD47, or other widely accepted standards for requirements documentation. 

There are two levels of qualification described. Level 1 is a pure process qualification intended to find reliability weaknesses. It primarily addresses technology wear-out mechanisms through package or wafer level reliability tests on specially designed test structures. 

Level 2 demonstrates the reliability of the process that corresponds to the reliability demands from projected or known applications. Level 2 testing can be implemented via the testing of a relevant functional technology qualification vehicle (TQV), including life test. 

Level 1 tests are described in JEP001-1 and JEP001-2, for back-end-of-line and transistor-level, respectively. This document describes Level 2 tests and requirements for a technology qualification vehicle.