CEI EN 62047-11 PDF

CEI EN 62047-11 PDF

Name:
CEI EN 62047-11 PDF

Published Date:
04/01/2014

Status:
[ Active ]

Description:

Semiconductor devices - Micro-electromechanical devices Part 11: Test method for coefficients of linear thermal expansion of freestanding materials for micro-electromechanical systems

Publisher:
Comitato Elettrotecnico Italiano

Document status:
Active

Format:
Electronic (PDF)

Delivery time:
10 minutes

Delivery time (for Russian version):
200 business days

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$25.5
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This part of IEC 62047 specifies the test method to measure the linear thermal expansion coefficients (CLTE) of thin free-standing solid (metallic, ceramic, polymeric etc.) microelectro- mechanical system (MEMS) materials with length between 0,1 mm and 1 mm and width between 10 μm and 1 mm and thickness between 0,1 μm and 1 mm, which are main structural materials used for MEMS, micromachines and others. This test method is applicable for the CLTE measurement in the temperature range from room temperature to 30 % of a material's melting temperature.


Edition : 14
File Size : 1 file , 1.4 MB
Number of Pages : 26
Published : 04/01/2014

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