Low prices! Originals & Translations! Save your budget and time!
ONLINENORMS: Online Standards Store
Click View Shopping Cart
  1. Home
  2. CEI
  3. CEI EN 62047-11 PDF

CEI EN 62047-11 PDF

CEI EN 62047-11 PDF

Name:
CEI EN 62047-11 PDF

Published Date:
04/01/2014

Status:
[ Active ]

Description:

Semiconductor devices - Micro-electromechanical devices Part 11: Test method for coefficients of linear thermal expansion of freestanding materials for micro-electromechanical systems

Publisher:
Comitato Elettrotecnico Italiano

Document status:
Active
Format:
Electronic (PDF)
Delivery time:
10 minutes
Delivery time (for Russian version):
200 business days
SKU:
Choose Document Language:
$25.5
Need Help?

This part of IEC 62047 specifies the test method to measure the linear thermal expansion coefficients (CLTE) of thin free-standing solid (metallic, ceramic, polymeric etc.) microelectro- mechanical system (MEMS) materials with length between 0,1 mm and 1 mm and width between 10 μm and 1 mm and thickness between 0,1 μm and 1 mm, which are main structural materials used for MEMS, micromachines and others. This test method is applicable for the CLTE measurement in the temperature range from room temperature to 30 % of a material's melting temperature.


Edition : 14
File Size : 1 file , 1.4 MB
Number of Pages : 26
Published : 04/01/2014

History

Related products

CEI EN IEC 60794-3-70
CEI EN IEC 60794-3-70
Published Date: 02/01/2022
Optical fibre cables Part 3-70: Outdoor cables - Family specification for outdoor optical fibre cables for rapid/multiple deployment
$13.5
CEI 0-8
CEI 0-8
Published Date: 09/01/1999
Guida introduttiva all’analisi del ciclo di vita nell’elettrotecnologia
$35.7
CEI 18-50
CEI 18-50
Published Date: 05/01/2000
Electrical installations in ships - Part 352: Choice and installation of cables for low-voltage power systems
$19.5
CEI EN 50290-2-33
CEI EN 50290-2-33
Published Date: 02/01/2017
Communication cables Part 2-33: Common design rules and construction - Polyethylene insulation compounds for multi element metallic cables for indoor installation (data cable)
$8.1

Best-Selling Products

CAN/CSA-ISO/TS 11137-4:21
CAN/CSA-ISO/TS 11137-4:21
Published Date: 05/01/2021
Sterilization of health care products - Radiation - Part 4: Guidance on process control (Adopted ISO technical specification 11137-4:2020, first edition, 2020-06)
$72
CAN/CSA-ISO/TS 11139:18
CAN/CSA-ISO/TS 11139:18
Published Date: 06/01/2018
Sterilization of health care products - Vocabulary (Adopted ISO/TS 11139:2006, second edition, 2006-01-15)
$32.7
CAN/CSA-ISO/TS 14048-03 (R2021)
CAN/CSA-ISO/TS 14048-03 (R2021)
Published Date: 03/14/2003
Environmental Management - Life Cycle Assessment - Data Documentation Format (Adopted ISO/TS 14048:2002, first edition, 2002-04-01)
$50.4
CAN/CSA-ISO/TS 14798-07
CAN/CSA-ISO/TS 14798-07
Published Date: 03/01/2007
Lifts (Elevators), Escalators and Moving Walks - Risk Assessment and Reduction Methodology
$51.3
CAN/CSA-ISO/TS 16058-05
CAN/CSA-ISO/TS 16058-05
Published Date: 02/01/2005
Health Informatics - Interoperability of Telelearning Systems (Adopted ISO/TS 16058:2004, first edition, 2004-07-01)
CAN/CSA-ISO/TS 16775:17
CAN/CSA-ISO/TS 16775:17
Published Date: 10/01/2017
Packaging for terminally sterilized medical devices - Guidance on the application of ISO 11607-1 and ISO 11607-2 (Adopted ISO technical specification 16775:2014, first edition, 2014-05-15)
$68.7