THIS PAPER REVIEWS THE CHANGE IN CLEANING PROCESSES AWAY FROM THE OZONE DEPLETING CHLORINATED SOLVENTS SUCH AS CFC-113 AND 1,1,1 TRICHLOROETHANE. THE RELEVANT REGULATIONS ARE EXAMINED FOR BACKGROUND AND OVERALL CHANGE-OUT PROCESS IS SUMMARIZED. CLEANLINESS STANDARDS, CHEMISTRIES AVAILABLE, EQUIPMENT OPTIONS AND WASTE HANDLING CONSIDERATIONS ARE ALL REVIEWED IN DEPTH.
